Company Overview
The Materials Metrology™ Company
ReVera is a leading provider of next generation metrology used to monitor and control films and critical layers deployed in the semiconductor manufacturing process. For many years, the industry has relied on optical-based technologies to measure thin films and layers in semiconductor devices. Due to the limitations of optical techniques when presented with smaller features and more complex materials, device manufacturers are increasingly turning to new metrology technology such as that provided by ReVera. This transition away from optical metrology increases as the industry moves through each successive technology node.
High-K Metal Gate
Now with high-k metal gate (HKMG) applications, the need for advanced, cost-effective metrology to measure, monitor and control critical HKMG materials properties in high-volume production – as well as enable rapid development and control of complex, new processes – is even more critical. ReVera systems set the standard for HKMG metrology applications including gate dielectrics, work function metals and metal gates, and are backed by a global network of support partners and an experienced staff of applications engineering, field service, sales and logistics personnel.
About ReVera
History
ReVera was established in 2004 as a management-led spin-out from Physical Electronics and its wholly owned subsidiary, Charles Evans and Associates. ReVera drew from the expertise of these companies in laboratory materials characterization and instrumentation, and became the first company to successfully create and commercialize a production-worthy materials metrology solution.
Technology
ReVera's products utilize x-ray photoelectron spectroscopy (XPS), a powerful technology that has been optimized to provide the automation, speed and reliability required in today's advanced semiconductor production environments. XPS is uniquely suited for the move to thinner films and smaller features, actually improving in performance at each new technology node.
Leadership
ReVera is lead by a strong team of industry experienced professionals that combine years of experience in the semiconductor equipment and metrology business with that of core surface analytical expertise, such as XPS, SIMS, Auger and many other techniques.
Coverage
ReVera has a large installed base of materials metrology systems at customers around the world. Systems are deployed for a wide variety of applications, in production through development, on product and monitor wafers. ReVera supports its global customer base with an established network of applications, field service and logistics personnel located close to its customers.
Location
ReVera’s Corporate Headquarters is located at 3090 Oakmead Village Drive in Santa Clara, California. Click here for directions or to contact us.