Gate Dielectrics
VeraFlex II – Addressing Gate
Dielectrics Applications
Challenges
Gate dielectrics incorporate complex, multi element materials. It is necessary to be able to uniquely determine both thickness and composition without the need for further off-line analysis. Traditional metrology cannot adequately address these challenges.
VeraFlex II Advantages
VeraFlex II can directly measure all the required attributes of complex gate dielectrics in-line at the throughput levels required for volume production.
Contact ReVera to discuss your specific high-k challenges, and the advantages of the VeraFlex II production metrology system to your production processes.