Metal Gates
VeraFlex – Addressing Metal Gate Applications
Challenges
Thickness and composition are critical parameters that must be measured and controlled in the production process, without the need for further off-line analysis.
VeraFlex II Advantages
VeraFlex II directly measures metal gate thickness and composition, providing unambiguous, actionable results. It operates in-line, and at the throughput levels required for volume production.
Contact ReVera to discuss your specific high-k challenges, and the
advantages of the VeraFlex II production metrology system to your
production processes.