Work Function Metals
VeraFlex II – Addressing Work Function
Metals Applications
Challenges
Work function films are very thin and vulnerable to both film thickness uniformity excursions as well as composition excursions. It is necessary to be able to separate out the two root causes of variation at the time of measurement without the need for further off-line analysis.
VeraFlex II Advantages
With the unique XPS technical approach of the VeraFlex II, ultra-thin films of varying composition are in the sweet spot of capability. VeraFlex II has the ability to precisely measure from sub-monolayer films to thicker films in-line at the throughput levels required for volume production.
Contact ReVera to discuss your specific high-k challenges, and the advantages of the VeraFlex II production metrology system to your production processes.