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Our newest offering, the VeraFlex™ Materials Metrology System, provides direct measurement of thickness and composition of advanced ultra-thin films and device structures. VeraFlex is quickly becoming recognized as the materials metrology tool of choice for leading edge production, filling the growing gaps left by traditional optical techniques.

High K Production Process Control
As process complexity increases, so does the need for direct measurement of high K gates. The solution – the VeraFlex system. Deployed inline for production process control, VeraFlex independently measures thickness and composition simultaneously for all advanced gate dielectrics. To learn more about controlling your high K gates with ReVera, visit us in Booth 2616, South Hall at SEMICON West.