ReVera, Inc.

ReVera’s materials metrology systems provide flexible solutions for critical problems.


Example 1 Optimized HfSiON Film

Example 2 DRAM TiN Electrode

Example 3 Flash Memory N-bonding

Example 4 High K Capacitor

Example 5 Multilayer Electrode Films

Applications Solutions

ReVera systems’ capabilities combine to measure, monitor, and control critical material properties for 65nm, 45nm and beyond.

Example 3: Flash Memory N-bonding

Problem Flash memory cell leakage performance degrades as Si-N chemical state is formed.
ReVera Solution Utilize thickness, composition and bonding states capabilities to avoid making Si-N and to monitor for Si – O, N – O bonds.