ReVera Ships a 7th VeraFlex II to East US Foundries
Latest repeat order builds on its leading position in High-K Metal Gate logic process control
Santa Clara, Calif., June 5, 2012 – Building on its leading position as plan of record for High K – Metal Gate (HKMG) logic process control, ReVera shipped a 7th VeraFlex II production XPS system to the Eastern US region. The system is the latest repeat order from one of ReVera’s foundry customers and will be used for in-line composition and multi-layer thickness control on production wafers.
“Repeat orders are driven by the rapid expansion of HKMG capacity at 32nm/28nm nodes and demonstrate the unique value of using the VeraFlex II in-line,” said Tom Larson, Vice President of Marketing at ReVera. “The need for direct measurement technology is even more critical at the 20nm node since the films are more complex, the tolerances increasingly stringent, and traditional metrology technologies struggle to provide the necessary sensitivity for process control.”
VeraFlex II is the only production-capable platform to use X-Ray Photoelectron Spectroscopy (XPS), a materials analysis technology that is proven essential to increase device yield. Since its introduction in 2010, the VeraFlex II has become process of record by all foundry manufacturers at the 3xnm and 2xnm technology nodes for film composition and thickness control on product wafers. The VeraFlex II is also used extensively by advanced node DRAM and Flash manufacturers to control critical tunnel oxides, capacitor films, contact layers, and other complex applications where traditional metrology approaches struggle to deliver viable solutions.
ReVera Incorporated, the materials metrology company, is a leader in high-k metal gate (HKMG) production metrology solutions for advanced semiconductor processing. Its products are used globally by device manufacturers to measure, monitor and control critical HKMG materials properties in high-volume production, and to enable rapid development and control of complex, new processes. ReVera systems set the standard for HKMG metrology applications including gate dielectrics, work function metals and metal gates, and are backed by a global network of support partners and an experienced staff of applications engineering, field service, sales and logistics personnel. Visit www.ReVera.com for more information.