HKMG Extendibility
VeraFlex II - Ready for Tomorrow’s Requirements
Today, traditional production metrology approaches are becoming increasingly ineffective, too costly and too complicated to implement for HKMG applications. In contrast, VeraFlex II was developed for today’s advanced HKMG production applications and designed to meet the requirements of the next generation of HKMG applications.
- Supporting 32nm today, and providing the capability for High-K advancements to 28nm, 22nm, 16nm and beyond
- Traditional ellipsometers are stretching the limits of their capabilities today, with no viable extendibility without significantly higher cost, ambiguous results and lower throughput