HKMG Performance
VeraFlex II – Proven Direct Measurement Performance
VeraFlex II provides direct measurement of composition, multiple layer thickness and other parameters for HKMG production applications. It offers higher system throughput and lower cost of ownership than previous systems, without impacting overall system precision and performance.
High measurement stability
- Accurate, unambiguous measurements with high confidence
- Robust and wide latitude recipes
- Robust system operation over time, stays in calibration
- Less manual monitoring and adjustment of system settings
- Less expertise required to maintain proper operation
Comprehensive direct measurement, high data value
- Direct measurement of composition, thickness of multiple layers, and other parameters in addition to single layer thickness
- No complex, time consuming correlations or reference tools as needed by ellipsometers
- Eliminates the need for a reference tool, enabling faster direct identification of problems without additional testing to deliver immediately actionable results