HKMG Production Ready
VeraFlex II Production Metrology System
The VeraFlex II was designed to address the stringent requirements of volume production of high-k metal gate (HKMG) technologies, offering dramatically increased throughput, state of the art precision and sensitivity, and significantly lower cost of ownership. Its proven direct measurement capabilities provide high measurement stability, actionable results and extendibility for future HKMG advancements.
VeraFlex II sets the standard for HKMG production metrology, offering:
- Proven direct measurement performance – Accurate, unambiguous and robust direct measurement of composition, multiple layer thickness and other parameters, without complex, time consuming correlations or reference tools as needed by ellipsometers
- High throughput – Six times higher than VeraFlex at required precision levels and greater effective throughput than ellipsometers
- Lowest cost of ownership – Higher productivity, lower support costs and equivalent capital cost as compared to ellipsometers without the added expense and delays of a reference tool
- Extendible – Broad, powerful capabilities offer extendibility for next generation HKMG applications, without the significantly higher cost and lower throughput required for ellipsometers
Proven in Development and Production
The VeraFlex platform has proven itself a key enabler in the development and pilot production of HKMG technologies for leading edge semiconductor manufacturers around the world. VeraFlex II builds on this established performance, implementing ReVera’s core technology in a high productivity system designed for volume HKMG production. The result is six times higher throughput and six times lower cost of ownership, in a system that is fully extendible for future HKMG advancements.