HKMG Throughput
VeraFlex II – Highest Effective Throughput
The VeraFlex II was designed to offer the optimal combination of throughput and precision for HKMG applications. Compared to previous generation VeraFlex systems, VeraFlex II offers six times higher throughput while maintaining precision. Its throughput is equivalent to that of traditional ellipsometers, while providing more comprehensive direct measurement.
High Availability
Beyond wafers per hour, VeraFlex II offers key advantages in areas that impact system availability and ultimately the productivity of your production process. Compared to traditional ellipsometers, VeraFlex II provides greater system availability:
- Direct measurement results eliminate time consuming and complex interpretation of results
- No delays for extraneous reference tool analysis to understand results
- Less time required to keep the tool operating properly, without manual monitoring and adjustment of system settings
No HKMG Throughput Reductions
In HKMG applications, VeraFlex II is not subject to added delays that impact availability, where the negative impact to your production flow from ellipsometers can be dramatic.