Other Systems
VeraFlex I Materials Metrology System
The VeraFlex I materials metrology system is a flexible, product wafer, non-destructive system that meets the demands for advanced materials metrology. It offers a broad range of flexible capabilities for a wide variety of critical applications, providing the capabilities needed to address ultra thin film and atomic level materials requirements for semiconductor production.
RVX 1000 Precision Gate and Capacitor Metrology System
The RVX 1000 precision gate and capacitor metrology system was the company’s initial materials metrology product. It provides measurement capabilities including thickness, composition and profile for developing and controlling advanced transistor gate and capacitor applications.
Click here for information on the VeraFlex II Production Metrology System.
System Comparison
VeraFlex I |
RVX 1000 |
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| Focus | |||
| High volume production |  |
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| Pilot production | |
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| Development | |
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| Process tool qualification | |
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| Production Features | |||
| High throughput | |
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| Production reliability | |
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| Leading cost of ownership | |
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| Extendible | |
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| Fab automation | |
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| Wafer Type | |||
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| Monitor | |
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| Measurement Capabilities | |||
| Thickness, composition, profile | |
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| Bonding states, interface quality, surface condition | |
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