VeraFlex™ II
Production Metrology System
Setting the Standard for HKMG Production Metrology
VeraFlex II builds on the capabilities of ReVera’s widely adopted VeraFlex platform, which has proven itself a key enabler in the development and pilot production of high-k metal gate (HKMG) technologies. Designed to address the stringent requirements of volume production, the VeraFlex II offers dramatically increased throughput and significantly lower cost of ownership. Its proven direct measurement capabilities provide high measurement stability, actionable results and extendibility for future HKMG advancements.
High throughput, production-ready
- Six times higher than VeraFlex I at required precision levels
Direct measurement with high measurement stability
- Accurate, unambiguous and robust direct measurements with robust and wide latitude recipes
- Comprehensive measurement of composition, multiple layer thickness and other parameters
- No complex, time consuming correlations or reference tools as needed by ellipsometers
Lowest cost of ownership for HKMG
- Higher productivity, lower support costs and equivalent capital cost as compared to ellipsometers
- No need for the added expense and delays of a reference tool
Extendible
- Broad, powerful capabilities offer extendibility for next generation HKGM applications
- Ellipsometers limited today with no viable extendibility without significantly higher cost and lower throughput
Addressing the Deficiencies of Traditional Metrology
VeraFlex technology has been vital to HKMG development. Now, as HKMG shifts into production, semiconductor manufacturers are finding that their traditional production metrology approaches are ineffective, too costly and too complicated to implement. Ellipsometers for example, can cost as much as 40% more to use for HKMG applications than non-HKMG applications once the hidden costs are accounted for, including:
- Engineering time to keep them stable
- Time consuming effort to interpret the indirect results
- Constant need for reference tools to validate the results