System to be used to enable rapid development of 45nm processes and to provide additional capacity for 65nm production

Sunnyvale, Calif., September 7, 2006 – ReVera Incorporated, the materials metrology company, today announced the purchase of its VeraFlex metrology system by the Crolles2 Alliance, a landmark partnership among semiconductor manufacturers Freescale, STMicroelectronics and Philips. Crolles2 will use the VeraFlex system to accelerate the development of their advanced 45nm System-on-Chip (SoC) processes and to provide additional metrology capacity for 65nm production. The purchase of VeraFlex enhances the materials metrology capabilities of the Crolles2 Alliance, which currently utilizes ReVera’s RVX1000 system for their production metrology requirements.

“Advanced materials metrology is a new requirement for rapid development and production of leading edge SoC solutions,” commented Joel Hartmann, director of the Crolles2 Alliance. “Our experience with ReVera and the RVX1000 has demonstrated a positive impact to precisely monitor and control the elemental composition of critical layers at the gate level.”

“Since the purchase of ReVera’s RVX1000 system by Crolles2, we have worked closely with the Alliance to understand their emerging requirements for both development and production and have designed our systems to address those needs,” commented ReVera CEO Dave Ring. “Their purchase of the VeraFlex system further illustrates the value of in-line materials metrology as a key enabling technology in the manufacture of next generation SoCs and the extendibility of ReVera’s solutions through 45 nm and beyond. We are excited about our growing presence at Crolles2 and ReVera’s continued leadership in the materials metrology arena.”

VeraFlex, ReVera’s second generation metrology system, provides a powerful solution for emerging materials metrology requirements. Its broad range of thin film and surface measurement capabilities are key to the rapid development and execution of new manufacturing processes that maximize device performance and yield. VeraFlex’s enhanced precision and productivity, small spot function for non-destructive product wafer analysis, and full integration into factory automation and material handing systems makes it ideal for the semiconductor manufacturing environment. In addition, VeraFlex’s precise tool-to-tool matching capabilities enable technology to be easily transferred from pilot to full production and from fab to fab.

About ReVera

ReVera Incorporated is a leading provider of materials metrology solutions for advanced semiconductor processing. Its products allow device manufacturers to measure, monitor and control critical materials properties, enabling them to rapidly integrate and manage new materials and processes required for the most advanced IC devices. ReVera systems are proven in production in a broad range of applications, and are backed by a global network of applications, field service, sales and logistics personnel. ReVera was established in 2004 as a management-led spin-out from Physical Electronics and its wholly owned subsidiary, Charles Evans and Associates. 

For more information, please contact:

John Samuels | ReVera Incorporated | 408-530-3600