Second ReVera metrology system to be deployed in Shanghai Fab 8 to facilitate
process transfer and rapid production ramping

Sunnyvale, Calif., March 5, 2007 – ReVera Incorporated, the materials metrology company, today announced the follow-on purchase of its VeraFlex metrology system by SMIC, a pure-play IC foundry. SMIC will deploy the new system to support volume production of 90 and 65nm devices at its 300mm Shanghai Fab 8 facility. Initially, VeraFlex will be used to accelerate the ramp of the new fab by assisting in tool qualification, after which the system will provide production and development metrology capacity. This deployment follows SMIC’s successful production experience with ReVera’s RVX 1000 system at its 300mm Beijing facility.

“ReVera’s technology has proven itself to be a valuable asset in the production of advanced ICs at our other production sites,” stated an SMIC representative. “When it came time to implement critical metrology capabilities for Fab 8, it was clear that building on the success we have had with the RVX 1000 was the obvious choice. ReVera’s tool-to-tool matching capabilities will allow SMIC to easily transfer our technologies between fabs and will also play a critical role in minimizing the ramp time of our new fab. In addition, VeraFlex’s pattern wafer measurement capability and zMAX depth distribution technology provide the added compositional information to enable greater inline control of our next generation gate processes.”

“The purchase of a VeraFlex system by SMIC for its new facility demonstrates the unmistakable value of ReVera’s materials metrology solutions in production, and the growing need for our technology in next-generation fabs.” commented ReVera CEO Dave Ring. “The manufacture of advanced semiconductor devices requires a metrology solution that can address the increasing level of sensitivity for the full range of leading edge films and structures – and that’s what our VeraFlex and RVX 1000 systems deliver. As process control requirements continue to increase, we are confident that our systems will continue to fill the growing gaps left by traditional optical techniques.”

VeraFlex provides a powerful solution for emerging materials metrology requirements on product wafers. Its broad range of thin film and surface measurement capabilities, including zMAX for elemental distribution, are key to the rapid development and execution of new manufacturing processes that maximize device performance and yield. Its precision, throughput, and full integration into factory automation and material handing systems make it ideal for the semiconductor manufacturing environment. In addition, VeraFlex’s tight tool-to-tool matching performance enables technology to be easily transferred from pilot to full production and from fab to fab.

About ReVera

ReVera Incorporated is a leading provider of materials metrology solutions for advanced semiconductor processing.  Its products allow device manufacturers to measure, monitor and control critical materials properties, enabling them to rapidly integrate and manage new materials and processes required for the most advanced IC devices.  ReVera systems are proven in production in a broad range of applications, and are backed by a global network of applications, field service, sales and logistics personnel.  ReVera was established in 2004 as a management-led spin-out from Physical Electronics and its wholly owned subsidiary, Charles Evans and Associates.

For more information, please contact:

John A. Samuels
ReVera Incorporated
408-530-3600

ReVera Incorporated
810 Kifer Road
Sunnyvale, CA 94086