Sunnyvale, Calif., March 25, 2005 – ReVera, a leading provider of advanced compositional metrology solutions for semiconductor device manufacturing, announced a second round of funding totaling $11.2 million. ATA Ventures of Redwood City, Calif. led the investment round, with original investor Crosslink Capital of San Francisco, Calif. and members of the company’s senior management also participating.

With the funding, ATA Ventures Managing Director Pete Thomas joins the ReVera Board of Directors along with Michael Stark and Dave Epstein of Crosslink Capital and Dave Perloff and Dave Ring of ReVera. Pete Thomas states: “Driven largely by the rapid growth of portable consumer semiconductor electronics, the latest semiconductor device technologies are implementing new, compositionally-critical materials and processes at an unprecedented pace. ReVera is successfully enabling the production of these new materials with their in-line compositional metrology technology and very nicely fits our investment target of companies that exhibit unusually superior technology.”

Dave Ring, CEO and President of ReVera, said: “We are delighted to have a semiconductor industry veteran and highly successful investor such as Pete Thomas of ATA Ventures join ReVera’s Board of Directors. We are also pleased by the continuing confidence shown by Crosslink Capital through their additional significant investment. We have seen rapid acceptance of our RVX1000 compositional metrology tool in leading-edge semiconductor fabs for production monitoring of advanced ultra-thin dielectric films and other processes. This round of funding will allow us to accelerate new product development and our global fan-out to additional customers and applications.”

About ATA Ventures
ATA Ventures is a venture capital firm focused on early-stage investment opportunities in the Information Technology sectors. Established in 2004, the firm combines the skills of its investment professionals to provide a team approach in the way it supports portfolio companies. ATA Ventures began managing its charter $150M fund (ATA Ventures I, LLP) in March of 2004 and targets investments in companies that exhibit unusually superior technology. For more information, visit www.ataventures.com.

About Crosslink Capital
Since 1989, Crosslink Capital has invested in growth equities through venture capital, hedge funds and crossover funds. The current venture fund (the firm's fourth) is a $240 million fund formed in 2000. Currently its venture investing activities are focused on the software, core technology/semiconductor and business services industries. Crosslink invests in very early, seed stage financings all the way through later-stage private opportunities and into the public market. This strategy allows Crosslink to remain a long-term partner to its portfolio companies. Crosslink Capital was the first venture capital firm in the U.S. to integrate public and private technology investing. To learn more about Crosslink Capital visit www.crosslinkcapital.com.

About ReVera
ReVera, Inc is the leading provider of high precision compositional metrology solutions for ultra-thin dielectric films used in advanced semiconductor devices. Established in 2004 with a management spin-out from High Voltage Engineering and Physical Electronics, ReVera is the first company to successfully commercialize traditional laboratory-based surface analytical techniques for production metrology of compositionally critical films in the semiconductor industry. To learn more about ReVera, visit www.revera.com.