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ReVera Announces Purchase of the VeraFlex™ Metrology
System by Toshiba
Expanded deployment of comprehensive materials metrology capabilities
enables faster development and higher production yield
Sunnyvale, Calif., December 6, 2006 –
ReVera Incorporated, the materials metrology company, today announced an
additional purchase of its VeraFlex™ metrology system by Toshiba Corporation, a
leader in the development and manufacture of electronic devices and components.
Toshiba will apply the broad measurement capabilities of this additional VeraFlex
system to their development and manufacturing activities. The deployment of
multiple VeraFlex systems will enable both rapid implementation of critical new
multilayer dielectric films and enhanced production through advanced metrology
control.
“The production of Toshiba’s most advanced devices utilizes a variety of new
materials and advanced manufacturing techniques,” commented ReVera CEO Dave Ring.
“However, they determined that the level of control required for these processes
was beyond the capabilities of traditional optical metrology. To address the
increased requirements, Toshiba selected VeraFlex. VeraFlex provides the
critical capabilities and reliable performance they need to speed development
and ramp, and then effectively monitor their volume production. We are pleased
by Toshiba’s selection and are committed to playing an increasing role in supporting
the IC manufacturing market with comprehensive materials metrology solutions.”
About VeraFlex
The VeraFlex system addresses the increasing demands for materials metrology
from development through production on product and monitor wafers. Based on XPS,
an industry standard for materials characterization, it offers broad measurement
capabilities – including thickness, composition, profile, bonding states,
interface quality and surface condition – in a production-proven system. This
provides a flexible solution for a wide range of emerging materials metrology
requirements for 65 nm, 45 nm and beyond.
About ReVera
ReVera Incorporated is a leading provider of materials metrology solutions for
advanced semiconductor processing. Its products allow device manufacturers to
measure, monitor and control critical materials properties, enabling them to
rapidly integrate and manage the new materials required for 65 nm, 45 nm and
beyond. ReVera systems are proven in production in a broad range of
applications, and are backed by a global network of applications, field service,
sales and logistics personnel. ReVera was established in 2004 as a
management-led spin-out from Physical Electronics and its wholly owned
subsidiary, Charles Evans and Associates.
For more information, please contact:
John A. Samuels, ReVera Incorporated, 408-530-3592
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