Flexible capabilities enable a leading microprocessor manufacturer to aggressively ramp production by controlling critical materials properties

Sunnyvale, Calif., March 28, 2006  – ReVera Incorporated, the materials metrology company, today announced that its recently introduced VeraFlex metrology system has been purchased, installed, accepted, and released to production by a leading microprocessor manufacturer. The customer selected VeraFlex for a variety of 65nm production applications and to accelerate their production ramp as a fully automated, in-line materials metrology solution.

“ReVera is pleased with the rapid adoption and acceptance of our new VeraFlex metrology system,” commented ReVera CEO Dave Ring. “The flexibility and broad capabilities of VeraFlex enable our customers to control critical processes today and to expand into future applications as new challenges emerge. Our work with this industry leader has validated what many of our customers are telling us – that in-line materials metrology, such as VeraFlex, is a key enabler in the production of advanced technologies at 65nm, 45nm and beyond.”

VeraFlex, ReVera’s second generation of fab proven metrology systems, provides a powerful solution for emerging materials metrology requirements. It offers broad materials measurement capabilities, a flexible recipe based approach, small spot size and pattern recognition capability. Its robust, high throughput architecture is uniquely suited and proven for full in-line integration with highly automated production environments, including factory automation systems and manufacturing execution systems (MES).

About ReVera

ReVera Incorporated is a leading provider of materials metrology solutions for advanced semiconductor processing. Its products allow device manufacturers to measure, monitor and control critical materials properties, enabling them to rapidly integrate and manage the new materials required for 65 nm, 45 nm and beyond. ReVera systems are proven in production in a broad range of applications, and are backed by a global network of applications, field service, sales and logistics personnel. ReVera was established in 2004 as a management-led spin-out from Physical Electronics and its wholly owned subsidiary, Charles Evans and Associates.

For more information, please contact:

Tom Larson
ReVera Incorporated
408-530-3600